英语语法分析

The AlN films have low residual stress and well thermal stability.

薄膜具有较低的残余应力和较好的热稳定性。

The technology of AlN ceramic substrate volume production is introduced in this paper.

文章主要介绍氮化铝陶瓷基片生产的关键技术。

AlN crystals were grown by modified sandwich sublimation method in nitrogen atmosphere.

采用改进的升华法在氮气环境下制备氮化铝单晶体。